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N-111 for precision positioning, semiconductor technology, and wafer inspection for semiconductors.

Long-distance nanopositioning PiezoWalk® drive. High resolution and compact design.

In semiconductor manufacturing equipment and inspection devices, high-precision positioning at the nanometer level significantly impacts product quality and yield. In particular, slight positioning errors in fine processing, wafer inspection, and measurement processes can lead to a decline in device performance or defects. The N-111 is a linear actuator that utilizes PI's proprietary NEXLINE(R) PiezoWalk(R) walking drive technology. It achieves high resolution at the nanometer level while maintaining a long stroke, enabling high-precision positioning in semiconductor manufacturing equipment and precision inspection devices. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection equipment - Nano measurement devices - Fine processing equipment - Precision positioning applications 【Benefits of Implementation】 - Improved quality through high-precision positioning - Increased yield - Enhanced productivity

  • Actuator
  • Linear motor
  • Piezoelectric Devices
  • Wafer Inspection

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